SUBSTRATE TRANSFER APPARATUS AND THIN FILM DEPOSITION APPARATUS HAVING THE SAME

摘要

A substrate transfer apparatus includes a guide rail, a carrier, a magnetic levitation unit, and a transferring unit. The guide rail is in a vacuum evacuable chamber. The carrier may carry a substrate and may be linearly movable along the guide rail. The magnetic levitation unit is configured to generate a magnetic levitation force between the guide rail and the carrier. The transferring unit is configured to generate a momentum for linearly transferring the carrier and includes a plurality of first transferring magnetic material members on an upper surface of the carrier, a plurality of second transferring magnetic material members over the carrier and spaced apart from the first transferring magnetic material members, and a plurality of containers in which the plurality of second transferring magnetic material members is respectively disposed.

主权项

1. A substrate transfer apparatus comprising:
a guide rail in a vacuum evacuable chamber; a carrier configured to linearly move along the guide rail and to which a substrate is mounted; a magnetic levitation unit configured to generate a magnetic levitation force between the guide rail and the carrier; and a transferring unit configured to generate a momentum for linearly transferring the carrier, the transferring unit comprising:
a plurality of first transferring magnetic material members on an upper surface of the carrier,a plurality of second transferring magnetic material members above the carrier and spaced apart from the first transferring magnetic material members, anda plurality of containers in which the plurality of second transferring magnetic material members is respectively disposed.