| 摘要 |
PROBLEM TO BE SOLVED: To provide a superior optical/electrical hybrid substrate with an optical element and an optical waveguide positioned with extremely high accuracy, and to provide a manufacturing method thereof.SOLUTION: A substrate 32, comprising an insulating layer 30 and a metal reinforcement layer 31, has an electrical circuit section 33 on the front surface side and an optical waveguide section 34 on the back surface side. The metal reinforcement layer 31 has an optical coupling through-hole 31a and an alignment through-hole 31b, and the electrical circuit section 33 has electrical wiring 35 including pads 35a, an optical element 50, a first alignment mark 36 for positioning a mirror section, and a second alignment mark 37 for positioning the optical element. The mirror section 43 of the optical waveguide section 34 is positioned in reference to the first alignment mark 36 which is visible through the alignment through-hole 31b, while the optical element 50 of the electrical circuit section 33 is positioned in reference to the second alignment mark 37. |
