| 摘要 |
This substrate-holding apparatus is provided with a substrate holder (WH) and a plurality of upwards/downwards-moving pin units (341, 342, 343). The substrate holder (WH) uses suction to hold a substrate (W). One end of each upwards/downwards-moving pin unit (341, 342, 343) has a suction part that applies suction to the bottom surface of the substrate, and in a state in which said suction parts are applying suction to the bottom surface of the substrate (W), the upwards/downwards-moving pin units (341, 342, 343) can move relative to the substrate holder (WH). At least parts of the upwards/downwards-moving pin units (341, 342, 343), including the aforementioned suction parts, are displaced in at least one direction by forces from the substrate (W) to which suction is being applied. |
