发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
摘要 The present invention relates to a semiconductor device and a method for forming the same and, more specifically, to a technology which forms a storage node contact. The semiconductor device of the present invention comprises: bit lines which are formed on a semiconductor substrate; a support film which is formed in the direction perpendicular to the bit lines; a first storage node contact which is formed on the bottom plate between the bit lines and support film; and a second storage node contact which is formed into a line shape separated by the support film on the first storage node contact and the upper side of the bit lines.
申请公布号 KR20150048510(A) 申请公布日期 2015.05.07
申请号 KR20130128665 申请日期 2013.10.28
申请人 SK HYNIX INC. 发明人 YOON, JAE MAN;KIM, YOUNG BOG;CHUN, YUN SEOK;CHOI, WOONG;LEE, WOO JUN
分类号 H01L21/28;H01L21/8242 主分类号 H01L21/28
代理机构 代理人
主权项
地址