发明名称 半導体装置及びその製造方法
摘要 <p>A semiconductor device includes a first insulating film formed above a semiconductor substrate, a fuse formed above the first insulating film, a second insulating film formed above the first insulating film and the fuse and including an opening reaching the fuse, and a third insulating film formed above the second insulating film and in the opening.</p>
申请公布号 JP5712875(B2) 申请公布日期 2015.05.07
申请号 JP20110194648 申请日期 2011.09.07
申请人 发明人
分类号 H01L21/82 主分类号 H01L21/82
代理机构 代理人
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