| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology capable of performing alignment of an energy analyzer with ease and with precision, even by a user who has not been trained and experienced for axis alignment work. <P>SOLUTION: Related to a method for axis alignment of an energy analyzer equipped with an energy deflector, a specimen is placed on a specimen stage which can be moved three-dimensionally. A secondary electron collector equipped with a slit is provided directly before the energy deflector. A particular signal electron is allowed to pass through the slit provided to the energy deflector, to detect spectrum intensity by way of the energy deflector. A secondary electron is collected by the secondary electron collector, for detecting a secondary electron intensity. By a technique for calculating a ratio between the signal intensities, a primary beam is caused to move on an x-y plane, to acquire a curve of the signal intensity ratio for a position on the x-y plane, for obtaining a peak position. The specimen is caused to move in a z-direction, to obtain a curve of the signal intensity ratio for the position in the z-direction, for obtaining a peak position. A point that is determined with the peak position on the x-y plane and the peak position in the z-direction is taken as an optimum point. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
