| 摘要 |
PROBLEM TO BE SOLVED: To achieve reduction in the configuration for performing the atmosphere replacement in a pod in a load port device.SOLUTION: A configuration for the atmosphere replacement is constructed of: a cylindrical gas circulation nozzle which has a flange and whose one opening is located on a placement table; a housing part in which the gas circulation nozzle penetrates through the axial direction and which has a pressure chamber separated and partitioned into a first pressure adjustment chamber and a second pressure adjustment chamber by the flange; a gas circulation chamber in which the other opening of the gas circulation nozzle is opened to the inside and the positional relationship with the pressure chamber is fixed; and pressure difference generating means for generating the pressure difference between the first pressure adjustment chamber and the second pressure adjustment chamber and actuating the pressure difference in the flange to move the gas circulation nozzle in the axial direction. |
