| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technique which improves accuracy of capacity variation due to external force in a variable capacity structure of which the capacity is varied by using flexure of a flexible tabular body due to the action of external force.SOLUTION: In a variable capacity structure of which the capacity is varied by external force, a quartz plate 20 provided with a movable electrode 24 is fixed in a vessel 50 by support arms 22 and 23, and a fixed electrode is provided in the vessel 50 so as to face the movable electrode 24. Further, the support arms 22 and 23 are configured to be rotationally symmetric and are provided so that base ends of respective support arms 22 and 23 are located in positions which are distant from positions of the quartz plate 20 at the shortest distances by 1/5 or more of an entire circumference of the quartz plate 20 along the peripheral edge of the quartz plate 20 when viewed from front ends of the corresponding support arms 22 and 23. Therefore, lengths from a centroid of the quartz plate 20 to the front ends of the support arms 22 and 23 are increased, and an amount of flexure of the quartz plate due to an external force acting on the quartz plate 20 is increased. Consequently, capacity variation due to the external force is increased to be able to increase the sensitivity of capacity variation to the external force.</p> |
