| 摘要 |
During the production of integrated circuits, when a spreading and developing machine which has high productivity and conducts on-line production with a photoetching machine is developed and designed, the number of process treatment modules in a machine table and the speed for transferring a robot process are required to be reasonably configured. Provided herein is a method for configuring the number of process treatment modules in a spreading and developing machine and the speed for transferring a robot process. According to the target productivity, a process time parameter TP of the machine table is established, a process treatment cycle time parameter Tn of each process treatment module in the machine table and a transfer cycle time parameter Tr for each wafer to transfer the robot process are designed so that the three time parameters are kept consistent. |
