发明名称 RECEIVING STRUCTURE FOR ELECTRICALLY CONNECTING A NANO-OBJECT ON A SURFACE THEREOF AND RE- ESTABLISH ELECTRICAL CONTACT WITH THE NANO-OBJECT ON THE OPPOSITE SURFACE, AND METHODS FOR MANUFACTURING THE STRUCTURE
摘要 Receiving structure for electrically connecting a nano-object on a surface thereof and re-establish electrical contact with the nano-object on the opposite surface, and methods for manufacturing the structure. The invention, that can be used for molecular characterisation, makes use of a support (44) to connect a nano-object (50) onto its top face and continue the electrical contact on its bottom face. At least two interconnects (52, 54) pass through the support. The two faces of the support comprise contact continuity zones (56, 58, 60, 62) for the interconnects. According to the invention, at least the zones (56, 58) in the top face are doped zones each having a pattern adapted to the fan out of the interconnect associated with it, on this face.
申请公布号 EP2867920(A1) 申请公布日期 2015.05.06
申请号 EP20130730901 申请日期 2013.06.25
申请人 COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES 发明人 BAILLIN, XAVIER;LEDUC, PATRICK
分类号 H01L21/768;B82Y10/00;H01L21/84;H01L23/498 主分类号 H01L21/768
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