发明名称 |
CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE WHICH IS PROVIDED WITH ANTISTATIC FILM OBTAINED FROM CONDUCTIVE POLYMER COMPOSITION, AND PATTERN FORMING METHOD USING CONDUCTIVE POLYMER COMPOSITION |
摘要 |
The present invention is a conductive polymer composition containing a À-conjugated conductive polymer, a polyanion, and a gemini surfactant. There can be provided a conductive polymer composition that has excellent antistatic performance and excellent application properties, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like. |
申请公布号 |
EP2868698(A1) |
申请公布日期 |
2015.05.06 |
申请号 |
EP20130813440 |
申请日期 |
2013.06.06 |
申请人 |
SHIN-ETSU POLYMER CO. LTD.;SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
SAWAI, TOSHIYA;NAGASAWA, TAKAYUKI;WATANABE, SATOSHI;MASUNAGA, KEIICHI |
分类号 |
C08L45/00;C08K5/16;G03F7/038;G03F7/039;G03F7/11 |
主分类号 |
C08L45/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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