发明名称 CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE WHICH IS PROVIDED WITH ANTISTATIC FILM OBTAINED FROM CONDUCTIVE POLYMER COMPOSITION, AND PATTERN FORMING METHOD USING CONDUCTIVE POLYMER COMPOSITION
摘要 The present invention is a conductive polymer composition containing a À-conjugated conductive polymer, a polyanion, and a gemini surfactant. There can be provided a conductive polymer composition that has excellent antistatic performance and excellent application properties, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
申请公布号 EP2868698(A1) 申请公布日期 2015.05.06
申请号 EP20130813440 申请日期 2013.06.06
申请人 SHIN-ETSU POLYMER CO. LTD.;SHIN-ETSU CHEMICAL CO., LTD. 发明人 SAWAI, TOSHIYA;NAGASAWA, TAKAYUKI;WATANABE, SATOSHI;MASUNAGA, KEIICHI
分类号 C08L45/00;C08K5/16;G03F7/038;G03F7/039;G03F7/11 主分类号 C08L45/00
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