Lead Lanthanum Zirconium Titanate (PLZT) capacitor on inorganic flexible glass substrate

摘要

A lead-lanthanum-zirconium-titanate (PLZT) capacitor (10) on a substrate (12) formed of an inorganic film glass. The first metallization layer (14) is deposited on a top side of the substrate (12) to form a first electrode (18). The dielectric layer (20) of PLZT is deposited over the first metallization layer (14). The second metallization layer (22) deposited over the dielectric layer (20) to form a second electrode (24). The glass substrate (12) is advantageous as glass is compatible with an annealing process at 650°C used to form the capacitor (10). Further, the inorganic glass film capacitor (10) can be roll to form a wound capacitor with increased electrical properties.