| 摘要 |
<p>The substrate plate (1) comprises substrate receptions for holding a substrate, and a drive, which drives the substrate receptions and has an eccentric drive element and a carrier element guidable from the drive element to a circular path around a plate axis (6) of the substrate plate, where each substrate reception is rotatably mounted onto the substrate plate around a substrate axis. The carrier element is a toothed wheel, which is supported on several bolts connected with the substrate plate and running parallel to the plate axis and drives the substrate reception over a sun gear. The substrate plate (1) comprises substrate receptions for holding a substrate, and a drive, which drives the substrate receptions and has an eccentric drive element and a carrier element guidable from the drive element to a circular path around a plate axis (6) of the substrate plate, where each substrate reception is rotatably mounted onto the substrate plate around a substrate axis. The carrier element is a toothed wheel, which is supported on several bolts connected with the substrate plate and running parallel to the plate axis, drives the substrate reception over a sun gear and has a central hole, in which an eccentric circular disc arranged to the plate axis slides as drive element. The substrate axes are opposite to the plate axis. The substrate plate has a shaft (7), which runs in the plate axis and has a positioning element for rotationally fixedly connecting with a supporting shaft of a coating system. The drive element is connected with a radial supporting lever functioning over the substrate reception. The supporting lever is connected with the drive element only up to an overload torque in a rotationally fixed manner. The substrate plate has a supporting sleeve (5), which laterally encloses the substrate plate. The supporting sleeve has bolts and the substrate receptions penetrate through the supporting sleeve into the holes. An independent claim is included for a system for coating substrates.</p> |
