| 发明名称 |
Site-isolated rapid thermal processing methods and apparatus |
| 摘要 |
Methods and apparatus are described that allow the investigation of process variables used in RTP systems to be varied in a combinatorial manner across a plurality of site-isolated regions designated in the surface of a substrate. The methods and apparatus allow process variables such as power, dwell time, light source, cooling gas composition, cooling gas flow rate, reactive gas composition, reactive gas flow rate, and substrate support temperature and the like to be investigated. |
| 申请公布号 |
US9023739(B2) |
申请公布日期 |
2015.05.05 |
| 申请号 |
US201213722624 |
申请日期 |
2012.12.20 |
| 申请人 |
Intermolecular, Inc. |
发明人 |
Korczynski Ed;Pramanik Dipankar |
| 分类号 |
H01L21/26;H05B1/02;H01L21/268;H01L21/67 |
主分类号 |
H01L21/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for processing a site isolated region, the method comprising providing a substrate;
contacting the substrate with a shield, wherein the shield comprises an opening, wherein the shield comprises an inlet and an outlet for a circulated coolant to regulate the temperature of the shield; processing a region in the opening of the shield using a RTP process. |
| 地址 |
San Jose CA US |
