Microelectromechanical sensor for measuring a force, and corresponding method

摘要

A microelectromechanical sensor is configured to measure a force, a pressure, or the like. The sensor includes a substrate and a measuring element. The measuring element includes at least two electrically conductive regions, and at least one of the electrically conductive regions is at least partly connected to the substrate. The sensor also includes at least one changing region, and the changing region lies at least partly between the electrically conductive regions. The changing region is configured in a substantially electrically insulating manner in an unloaded state and in a substantially electrically conductive manner in a loaded state.

主权项

1. A microelectromechanical sensor for measuring a force, a pressure or the like, comprising:
a substrate; and four measuring elements, each measuring element including:
at least two electrically conductive regions, at least one of the electrically conductive regions of a first measuring element of the four measuring elements being at least partially connected to the substrate; andat least one changing region at least partially arranged between the electrically conductive regions, the changing region being substantially electrically insulating in an unloaded state and being substantially electrically conductive in a loaded state, wherein the four measuring elements are connected in the form of a Wheatstone bridge.