Resonant transducer, method of producing the resonant transducer, and ultrasonic treatment tool including the resonant transducer

摘要

A resonant transducer comprising:
a vibration plate; anda piezoelectric element including a piezoelectric film and an upper electrode that are laminated on the vibration plate, whereina compressive stress is applied to the piezoelectric film.

主权项

1. A resonant transducer comprising:
a vibration plate; and a piezoelectric element including a piezoelectric film and an upper electrode that are laminated on the vibration plate, wherein a compressive stress is applied to the piezoelectric film, the vibration plate vibrates in an expanding/contracting manner in a direction parallel to a surface on which the piezoelectric element is formed, and the vibrating plate is supported only in a surface perpendicular to a vibration direction of the vibrating plate and parallel to a lamination direction of the vibration plate and the piezoelectric element.