Substrate for flexible device, thin film transistor substrate for flexible device, flexible device, substrate for thin film element, thin film element, thin film transistor, method for manufacturing substrate for thin film element, method for manufacturing thin film element, and method for manufacturing thin film transistor

摘要

Disclosed is a substrate for a flexible device which, when a TFT is produced on a flexible substrate in which a metal layer and a polyimide layer are laminated, can suppress deterioration of the electrical performance of the TFT due to the surface irregularities of the metal foil surface and can suppress detachment or cracks of the TFT. Also disclosed is a substrate for a thin film element which has excellent surface smoothness and is capable of suppressing deterioration of the characteristics of thin film elements. Also disclosed are methods for manufacturing substrates for thin film elements.

主权项

1. A substrate for a flexible device, comprising a metal foil; a planarizing layer that is formed on the metal foil and contains polyimide; and a contact adhesive layer that is formed on the planarizing layer and contains an inorganic compound,
wherein the planarizing layer and the contact adhesive layer are formed partially over the metal foil, and the planarizing layer and the contact adhesive layer are formed in an area excluding the outer peripheral area of the metal foil.