Waveguide avalanche photodetectors

摘要

Devices comprised of end-on waveguide-coupled photodetectors are described. In embodiments of the invention, the photodetectors are avalanche photodiodes coupled end-on to a waveguide. The waveguide includes an insulating trench proximate to the coupled photodetector. In embodiments of the invention, the avalanche photodiodes are silicon/germanium avalanche photodiodes.

主权项

1. A device comprising,
a substrate, a semiconductor waveguide disposed on the substrate, and a photodetector optically coupled directly to the waveguide wherein the photodetector is capable of converting an optical signal received from the waveguide into an electrical signal and wherein there is an interface between the photodetector and the waveguide where the photodetector and the waveguide are optically coupled, and an insulating trench comprising a region of insulating material wherein the insulating trench is in the interface where the photodetector and the waveguide are coupled.