Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and ink-jet printer device

摘要

The displacement as an actuator or the sensitivity as a sensor of a piezoelectric element can be increased and, in addition, the electric power consumption can be reduced by providing a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer.

主权项

1. A piezoelectric element characterized by comprising a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate in the piezoelectric layer has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer, and the thin film of potassium-sodium niobate contains at least a tetragonal crystal, wherein in the piezoelectric layer, there is a second axis of rotational symmetry, with respect to which the crystal orientation of the crystal structure of potassium-sodium niobate has fourfold symmetry and which is inclined from the thickness direction, in addition to the first axis of rotational symmetry.