Handler for conveying a plurality of devices under test to a socket for a test and test apparatus

摘要

A handler for conveying DUTs to a socket for a test that can reduce a test time includes: a test section including the socket; a heat applying section into which a tray having plural DUTs placed on its surface is conveyed and that controls the temperature of the DUTs to a predetermined test temperature and conveys the tray into the test section; and a device image capturing section that includes imaging elements arranged along a first direction the number of which is equal to DUTs arranged along the first direction and that in the heat applying section, captures images of the DUTs by moving the imaging elements relative to the surface of the tray in a second direction non-parallel with the first direction; and a position adjusting section that adjusts the positions of the DUTs relative to the socket based on their images captured by the device image capturing section.

主权项

1. A handler for conveying a plurality of devices under test to a socket for a test, comprising:
a test section in which the socket is provided; a heat applying section, into which a tray on a surface of which the plurality of devices under test are placed is conveyed, and that controls a temperature of the plurality of devices under test to a predetermined test temperature and conveys the tray into the test section; a device image capturing section that includes a plurality of imaging elements which are arranged along a first direction and a number of which is equal to a number of the devices under test arranged along the first direction, and that, in the heat applying section, captures images of respective ones of the devices under test by moving the plurality of imaging elements with respect to the surface of the tray in a second direction that is not parallel with the first direction; and a position adjusting section that adjusts positions of the devices under test with respect to the socket corresponding to the devices under test, based on the images of the devices under test captured by the device image capturing section.