| 摘要 |
An aspect of the invention is a method for manufacturing a curved grating, comprising: a grating forming step for forming a grating area on one surface of a grating-forming base material, said grating area being an area wherein a plurality of members having the same shape are periodically arranged; a stress layer forming step for forming a stress layer which causes stress on the grating surface of the grating area; a bonding step for bonding a supporting substrate on the stress layer; a polishing step for polishing the other surface of the grating-forming base material, which is on the reverse side from the one surface, when the grating-forming base material has the supporting substrate bonded thereto; and a stripping step for stripping the supporting substrate from the stress layer. The polishing step is performed so that the grating-forming base material curves from the stress caused by the stress layer after the stripping step. |
