| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrophotographic photoreceptor having a deposited film with excellent uniformity of film qualities. <P>SOLUTION: The method for manufacturing an electrophotographic photoreceptor comprises: disposing a conductive cylindrical substrate held by a conductive substrate holder and a conductive cylindrical assistant substrate in a reaction chamber having a reaction space that can be kept air-tight in vacuum; and introducing a raw material gas for forming a deposition film and high-frequency electric power into the reaction chamber to generate plasma so as to form a deposition film on the surface of the cylindrical substrate. The deposition film is formed while an end of the cylindrical substrate and an end of the cylindrical assisting substrate are in contact with each other via a conductive material. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
