| 发明名称 |
CASSETTE TRANSFER APPARATUS AND CASSETTE TRANSFERRING METHOD USING THE SAME |
| 摘要 |
A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon. |
| 申请公布号 |
US2015117988(A1) |
申请公布日期 |
2015.04.30 |
| 申请号 |
US201414494669 |
申请日期 |
2014.09.24 |
| 申请人 |
YUK Nam-Su;KANG Kyung-Won;KIM Tae-Hun;PARK Se-Ho;PARK Juno;LEE Yong-Won |
发明人 |
YUK Nam-Su;KANG Kyung-Won;KIM Tae-Hun;PARK Se-Ho;PARK Juno;LEE Yong-Won |
| 分类号 |
H01L21/677;H01L21/673 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cassette transfer apparatus, comprising a holding unit configured to hold a cassette having a wafer loaded therein, wherein the cassette has at least one stepped part, and the holding unit includes at least one holding part configured to have the at least one stepped part placed thereon. |
| 地址 |
Suwon-si KR |
