| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film coating device capable of applying a thin film of predetermined pattern, in detail, to a substrate. <P>SOLUTION: The thin film coating device comprises a plurality of nozzle heads each including a nozzle array where a plurality of nozzles, each ejecting a thin film material in the z direction when a xyz orthogonal coordinate system is defined, are arranged in the y direction, and a holder for holding the plurality of nozzle heads. The holder has a positioning mechanism capable of defining the placement position of each of the plurality of nozzle heads in the y direction when the plurality of nozzle heads are attached. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
