发明名称 インプリント用硬化性組成物、パターン形成方法およびパターン
摘要 <p>Provided is a curable composition for imprints capable of ensuring good patternability after repetitive transfer of pattern, and less causative of defects. The curable composition for imprints comprising a polymerizable compound (A), a photo-polymerization initiator (B) and a non-polymerizable compound (C); the non-polymerizable compound (C) dissolving into the curable composition for imprints in an exothermic manner.</p>
申请公布号 JP5710553(B2) 申请公布日期 2015.04.30
申请号 JP20120167695 申请日期 2012.07.27
申请人 发明人
分类号 H01L21/027;B29C59/02;C08F2/00;C08F2/48;C08F220/18;C08F220/24;C08F220/38 主分类号 H01L21/027
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