TANTALUM SPUTTERING TARGET AND METHOD FOR PRODUCING SAME,申请号KR20157007541-传众专利搜索

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发明名称	TANTALUM SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
摘要	탄탈 스퍼터링 타깃의 스퍼터면에 있어서, (200) 면의 배향률이 70 ％ 를 초과, 또한 (222) 면의 배향률이 30 ％ 이하인 것을 특징으로 하는 탄탈 스퍼터링 타깃. 타깃의 결정 배향을 제어함으로써, 탄탈 타깃의 방전 전압을 낮추어 플라즈마를 발생시키기 쉽게 함과 함께, 플라즈마의 안정성을 향상시키는 효과를 갖는다.
申请公布号	KR20150046278(A)	申请公布日期	2015.04.29
申请号	KR20157007541	申请日期	2013.12.06
申请人	제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤	发明人	센다 신이치로;나가츠 고타로
分类号	C23C14/34;H01L21/02	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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