SUBSTRATE TRANSPORT SYSTEM

摘要

A substrate conveying system includes a substrate supply unit (2) including a movable rack (21) and an up-down unit (22) which moves the movable rack (21) down, a lift unit (3) which has one or more ejection holes (35) which eject a gas upward and is configured to lift-up the substrate supported on the movable rack by the pressure of the gas ejected through ejection holes when the up-down unit moves the movable rack down, and a conveying unit (4) which includes a conveyor (40), and hook elements (41) extending upward from the conveyor, and is configured to push in a conveying direction the substrate W being lifted-up by the pressure of the gas ejected through the ejection holes.