MEMS SENSOR

摘要

According to a desired first embodiment of the present invention, a MEMS sensor includes: a flexible substrate which includes an excitation means and a detection means; a mass coupled to the flexible substrate; and a support unit supporting the flexible substrate. The excitation means includes a multi-layered piezoelectric body part and an electrode unit connected to the multi-layered piezoelectric body part, and the detection means includes a piezoelectric body and the electrode unit. The multi-layered piezoelectric body part is poled in the same direction, and one piezoelectric body among piezoelectric bodies which contact with each other expands or contracts in the direction opposite to another piezoelectric body. A top layer of the excitation means and a top layer of the detection means are positioned on the same surface with respect to the accumulation direction where the excitation means and the piezoelectric body of the detection means and the electrode unit are accumulated, respectively.