Laminated plasmon generator with cavity process

摘要

A plasmon generator (PG) is disclosed with a laminated structure of non-planar X and Y layers formed between a waveguide and write pole. Each X layer is made of a noble metal such as Au while each Y layer is a non-noble metal or dielectric material to improve durability. As a result, the PG has a peg portion at an air bearing surface with improved reliability compared with pegs made entirely of a noble metal. Non-planarity of X and Y layers improves diffusion of Y material between X grains thereby minimizing X grain growth to enhance thermal stability. The laminated PG is formed by a process sequence that involves forming and filling a cavity, and concludes with a chemical mechanical polish process to form a planar top PG surface that faces a write pole leading side.

主权项

1. A plasmon generator (PG) having a planar bottom surface and a planar top surface, and with a first thickness in a down-track direction, and that propagates light energy from a light source towards an air bearing surface (ABS) in a write head, a portion of the light energy is coupled to a surface plasmon mode along sidewalls and the planar bottom surface of the PG, the surface plasmon mode is propagated to a peg portion of the PG at the ABS and projected as an optical spot on a magnetic medium and thereby provides localized heating to facilitate a write process, the PG comprises a plurality of non-planar layers each having a center section formed parallel to the planar bottom PG surface that is aligned in a plane that is perpendicular to the down-track direction, and side sections each formed parallel to a nearest PG sidewall, the plurality of non-planar layers comprises:
(a) a plurality of “n” X layers where X is one of Au, Ag, Cu, Al, or alloys thereof with Co or Ni; and (b) a plurality of “n” or “n−1” Y layers where Y is a metal that is one of Ru, Cr, Pd, Pt, Ti, W, Ta, Mg, Fe, Co, Ni, Cu, Zr, Y, or a dielectric material that is one of Ta2O5, Al2O3, SiO2, SiON, Si3N4, Ti2O5, and HfO2 wherein X and Y layers are formed in an alternating design beginning with a bottommost first X layer, and each X layer has a thickness that is greater than a thickness of an overlying Y layer.