STAGE DEVICE, EXPOSURE APPARATUS AND DEVICE PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an exposure apparatus which can suppress effectively vibration generated in movement of a stage even when the vibration changes in frequency according to the arrangement location and/or time.SOLUTION: A movable stage 12 having a fixed stage, a movable stage and a movable cable connected between the fixed and movable stages includes an active vibration-damping device which can suppress vibration transmitted from the movable cable to the fixed stage or the movable stage by active control.