TUNABLE WAVELENGTH FILTER WITH EMBEDDED METAL TEMPERATURE SENSOR AND EXTERNAL-CAVITY TYPE TUNABLE WAVELENGTH LASER MODULE

摘要

PROBLEM TO BE SOLVED: To provide a tunable wavelength filter with an embedded metal temperature sensor and an external-cavity type tunable wavelength laser module.SOLUTION: A tunable wavelength filter 10 with an embedded metal temperature sensor can achieve wavelength stability by forming a metal temperature sensor 500 using a resistance change of a metal thin film according to temperature on a point on an isotherm having the same temperature distribution as an optical waveguide 100 during a process for fabricating the optical waveguide 100 with a polymer to enable accurate temperature measurement of the optical waveguide 100.