| 摘要 |
The invention relates to a System (1), comprising a process Chamber (5), which comprises an interior (39) having an accommodating region (15) for workpieces (3). The process Chamber (5) has an opening (12, 14) for supplying or removing workpieces (3). The process Chamber (5) is formed with a device (17, 9, 25, 29, 33, 37, 35) for blowing gaseous fluid into the interior (39), which device has at least one nozzle (17, 19) or orifice for producing a fluid flow curtain (21, 23) between the opening (12, 14) and the accommodating region (15) for workpieces (3). The process Chamber (5) has an apparatus (74) for supplying fresh air, by means of which fresh air can be introduced into the accommodating region (15) on a side of the fluid flow curtain (21, 23) facing away from the opening (12, 14). |
