| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck cleaner and a cleaning method capable of reliably removing foreign matters.SOLUTION: There is provided a chuck cleaner which includes: a support medium; an adhesive layer; and a support substrate. The support medium includes: a first part; a second part; and a third part formed between the first part and the second part. The support substrate is formed between the support medium and the adhesive layer. The support substrate includes: a first area fixed to the first part; a second area fixed to the second part; a third area formed between the first area and the second area and the distance to the third part is variable; a fourth area formed between the first area and the third area and is separated away from the support medium; and a fifth area formed between the second area and the third area and is separated away from the support medium. After bringing the adhesive layer into contact with foreign matters accumulated on the chuck part for holding an object to be held, the adhesive layer is peeled off from the chuck part, to thereby transfer the foreign matters from the chuck part to the adhesive layer. |
