发明名称 |
SEMICONDUCTOR STRUCTURES INCLUDING MOLYBDENUM NITRIDE, MOLYBDENUM OXYNITRIDE OR MOLYBDENUM-BASED ALLOY MATERIAL, AND METHOD OF MAKING SUCH STRUCTURES |
摘要 |
A semiconductor structure may include a first electrode over a substrate, a high-K dielectric material over the first electrode, and a second electrode over the high-K dielectric material, wherein at least one of the first electrode and the second electrode may include a material selected from the group consisting of a molybdenum nitride (MoxNy) material, a molybdenum oxynitride (MoOxNy) material, a molybdenum oxide (MoOx) material, and a molybdenum-based alloy material comprising molybdenum and nitrogen. |
申请公布号 |
WO2015057508(A1) |
申请公布日期 |
2015.04.23 |
申请号 |
WO2014US60030 |
申请日期 |
2014.10.10 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
ROCKLEIN, MATTHEW N.;REDDY, KOTHA SAI MADHUKAR;ANTONOV, VASSIL;BHAT, VISHWANATH |
分类号 |
H01L21/28;H01L21/8242;H01L27/108 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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