| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrode pad structure in which a highly accurate test can be achieved.SOLUTION: The electrode pad structure includes: an electrode pattern 16 formed on an insulating film 12 and having a connecting position 22 on a center part; a via hole 12a arranged in a region corresponding to the connecting position 22 of the insulating film 12; a signal wiring 14a located under the insulating film 12 and connected to the electrode pattern 16 through the via hole 12a; and hemispherical pads 18 arranged on the electrode pattern 16 and each having a surface on which distances up to the connecting portion 22 are substantially fixed from any positions of the upper surface.</p> |
