| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element support device capable of suppressing the deformation of an optical element.SOLUTION: A reflecting mirror support device supports an optical element by the combination of a plurality of support mechanism units 200. The support mechanism unit 200 includes: a terminal pad 33 which is a fitting part attached to the optical element or a support base; a support leg member 10; and an elastically deformable elastic hinge 20 arranged between the support leg member 10 and the terminal pad 33. Spherical washers 34, 35 arranged between the support leg member 10 and the terminal pad 33 can tilt relative to a support leg part 10 of the terminal pad 33, and wedge type washers 36a, 36b arranged between the support leg member 10 and the terminal pad 33 adjust a tilt amount. A nut 37 fixes the tilt. |
