| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor element capable of securing the improvement quantity of the mass balance of a vibrating body.SOLUTION: A first recess 36a, second recess 46a, third recess 56a, and fourth recess 60a are disposed on the plane on the same side as the side having detection electrodes and drive electrodes of vibrating bodies in a first weight part 36, second weight part 40, third weight part 56, and fourth weight part 60. The mass of a weight part heavier than the vibrating body is adjusted. Therefore, the improvement quantity of the mass balance in the Z-axis direction of an angular velocity sensor element is increased, and hence the vibrating body can be accurately vibrated and driven in the X-axis direction. |
