发明名称 PATTERN FORMING METHOD, MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM AND FINE PARTICLE DISPERSION LIQUID
摘要 <p>PROBLEM TO BE SOLVED: To provide a pattern forming method and manufacturing method of magnetic recording medium capable of forming a periodic pattern with satisfactory in-plane uniformity.SOLUTION: There is provided a pattern forming method has a step to form a fine particle layer on a substrate or mask layer by applying, over a substrate or mask layer, a fine particle application liquid which contains fine particles which have a protective group each having a close surface polarity and has, at least on the surface, material selected from a group of Al, Ti, V, Cr, Mn, Fe, Co, Ni, Zn, Y, Zr, Sn, Mo, Ta, W, Au, Ag, Pd, Cu, Pt, and oxides thereof; a viscosity modifier, and a solvent for adjusting the mixture of the viscosity modifier and fine particles having the protective group.</p>
申请公布号 JP2015079555(A) 申请公布日期 2015.04.23
申请号 JP20140092056 申请日期 2014.04.25
申请人 TOSHIBA CORP 发明人 KIMURA KAORI;TAKIZAWA KAZUTAKA;FUJIMOTO AKIRA
分类号 G11B5/84;B82Y25/00;B82Y40/00;G11B5/855 主分类号 G11B5/84
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