PLASMA PROCESSING APPARATUS

摘要

A plasma processing apparatus for exciting a processing gas by a microwave, includes a focus ring extending in an annular shape, a first tubular member being wrapped around a central axis to extend along an outer periphery of the lower electrode below the focus ring, an annular member made of a dielectric material provided between the focus ring and the first tubular member a second tubular member extending along an outer periphery of the first tubular member and a choke portion suppressing a microwave propagating through the first tubular member via the focus ring and the annular member. And the choke portion protrudes outward in a diametrical direction of the first tubular from the outer periphery of the first tubular member and extends in an annular shape along the periphery of the first tubular member, the choke portion is covered by the second tubular member.

主权项

1. A plasma processing apparatus for exciting a processing gas by a microwave, comprising:
a processing chamber; a mounting table provided in the processing chamber, the mounting table including a lower electrode and an electrostatic chuck provided on the lower electrode; a focus ring made of a dielectric material, extending in an annular shape so as to surround the electrostatic chuck; a first tubular member made of a dielectric material, the first tubular member being wrapped around a central axis to extend along an outer periphery of the lower electrode below the focus ring; an annular member made of a dielectric material, provided between the focus ring and the first tubular member; a conductive second tubular member extending along an outer periphery of the first tubular member; and a choke portion made of a dielectric material, serving to suppress a microwave propagating through the first tubular member via the focus ring and the annular member, wherein the choke portion protrudes outward in a diametrical direction of the first tubular from the outer periphery of the first tubular member and extends in an annular shape; the second tubular member includes an upper portion and a lower portion which are separable from each other; and the choke portion is interposed between the upper portion and the lower portion so as to be covered by the second tubular member.