| 摘要 |
PROBLEM TO BE SOLVED: To provide an x-ray inspection device for performing an X-ray inspection with a reduced dead angle and improved inspection accuracy in a simple structure.SOLUTION: An x-ray inspection device includes: a plurality of slits 104a and 104b which is installed in a collimator 15 and which makes an X-ray 5 emitted from a transmission type X-ray source 10 form a plurality of fan beam X-rays 106a and 106b; and a plurality of detecting parts 110a and 110b which detects a plurality of X-ray transmission images by making the fan beam X-rays pass through a specimen 108. |
