| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generator that can be used efficiently.SOLUTION: An X-ray generator 1 includes an electron gun 3, a target section T, a cylindrical section 5, a reflection electron detector 31, and a coil 9. In the target section T, a plurality of targets 23 are arranged, and a plurality of marks 27, having a predetermined physical relationship for the targets 23 and having a surface area larger than that of the target 23, when viewing from the opposite direction of the principal surface of the target section T, are arranged. |
