| 摘要 |
A piezo ceramic planar motor comprises a planar substrate and a rotor installed on the planar substrate. The piezo ceramic planar motor further comprises: at least one piezo ceramic driving leg. The piezo ceramic driving leg is disposed on the rotor, to drive the rotor to move on the planar substrate in all directions in the plane. Also provided is a method of driving a planar motor by using a piezo ceramic driving leg, which implements three movement modes, namely, a sliding mode, a walking mode, and a fine tuning mode. The piezo ceramic planar motor and the driving method described thereof can effectively overcome the defects of a small movement range and a low speed of a conventional nano-positioning platform. |
