发明名称 |
TRANSPORT AND HANDING-OVER ARRANGEMENT FOR DISC-SHAPED SUBSTRATES, VACUUM TREATMENT INSTALLATION AND METHOD FOR MANUFACTURE TREATED SUBSTRATES |
摘要 |
<p>A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).</p> |
申请公布号 |
EP2862200(A1) |
申请公布日期 |
2015.04.22 |
申请号 |
EP20130725976 |
申请日期 |
2013.05.30 |
申请人 |
OERLIKON ADVANCED TECHNOLOGIES AG |
发明人 |
VOSER, STEPHAN;GAECHTER, BRUNO;MATTEACCI, PIERRE |
分类号 |
H01L21/67;B01L9/00;C23C14/04 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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