发明名称 半導体基板の製造方法
摘要 The present invention provides a method of manufacturing a semiconductor substrate that includes a substrate, a first semiconductor layer arranged on the substrate, a metallic material layer arranged on the first semiconductor layer, a second semiconductor layer arranged on the first semiconductor layer and the metallic material layer, and a cavity formed in the first semiconductor layer under the metallic material layer.
申请公布号 JP5706919(B2) 申请公布日期 2015.04.22
申请号 JP20130019926 申请日期 2013.02.04
申请人 发明人
分类号 H01L33/20;C23C16/04;C23C16/34;C30B29/38;H01L21/205;H01L33/32 主分类号 H01L33/20
代理机构 代理人
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