发明名称 SPLIT LASER SCRIBE
摘要 <p>A dual-beam laser cutting system uses laser beam polarization to output two identical laser beams. The dual identical laser beams are spaced appropriately to simultaneously cut a water thus increasing the laser cutting system's throughput as compared to a single-laser cutting system. In one implementation, the dual-beam laser cutting system 100 utilizes a beam expander 220, two half-wave plates 224, 238, a polarizing beam splitter 228, a mirror 236, and two lenses 234, 242 to provide two identical laser beams 202, 204 from a single laser source 214. The identical laser beams 202, 204 are tuned to have the same power, cross-sectional diameter, and polarization direction. One of the half-wave plates 224 is rotated to yield laser beams with the same power. The other half-wave plate 238 is rotated to yield laser beams with the same polarization direction.</p>
申请公布号 EP2537179(A4) 申请公布日期 2015.04.22
申请号 EP20100848614 申请日期 2010.10.08
申请人 VEECO INSTRUMENTS INC. 发明人 WANG, JIANMIN;METZNER, CRAIG;SCHUH, GREGORY, W.
分类号 H01L21/46 主分类号 H01L21/46
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