Coating device including substrate carrying, application and removal units

摘要

Provided is a coating device including: a substrate carrying unit which rotatably holds a substrate while the substrate is upright and is able to dispose the held substrate at a first position and a second position; an application unit which includes a liquid material nozzle ejecting a liquid material to each of first and second surfaces of the substrate disposed at the first position; and a removal unit which includes an accommodation mechanism accommodating a part of the peripheral edge portion of the substrate disposed at the second position and a cleaning liquid ejection mechanism ejecting a cleaning liquid to the peripheral edge portion and removes the liquid material of the peripheral edge portion.

主权项

1. A coating device comprising:
a substrate carrying unit which rotatably holds a substrate while the substrate is upright and is able to dispose the held substrate at a first position and a second position; an application unit which includes a liquid material nozzle ejecting a liquid material to each of first and second surfaces of the substrate disposed at the first position, so as to form coating films on the first and second surfaces of the substrate; and a removal unit comprising: an accommodation mechanism configured to accommodate part of a peripheral edge portion of the substrate disposed at the second position, the accommodation mechanism including an end portion accommodation portion configured to accommodate a lower end portion of the substrate, the end portion accommodation portion including a nozzle insertion portion, and a cleaning liquid ejection mechanism including a cleaning liquid nozzle and a rotatable arm, the cleaning liquid nozzle including a bent portion, wherein the cleaning liquid ejection mechanism is configured to be rotated clockwise or counter-clockwise such that the cleaning liquid nozzle is inserted into the nozzle insertion portion, and to eject a cleaning liquid to the peripheral edge portion and remove the liquid material of the peripheral edge portion while the cleaning liquid nozzle is inserted in into the nozzle insertion portion.