Relief pattern detection device

摘要

The present invention aims to provide a highly reliable relief pattern detection device 1, including a slant FOP 3 having an input end surface 4 with which an object surface makes contact and an output end surface 5 substantially parallel to the input end surface 4, an irradiation light source 10 disposed on the output end surface 5 side of the slant FOP 3, for irradiating the output end surface 5 with light, and a CCD camera 11 disposed on the output end surface 5 side of the slant FOP 3, for detecting a relief pattern based on light emitted from the output end surface 5, in which optical axes Rf of optical fibers are inclined so as to create a first angle α less than 90° in one direction from the output end surface 5 within a predetermined plane substantially perpendicular to the output end surface 5, the irradiation light source 10 irradiates the output end surface 5 with light in a direction to create a second angle β less than 90° in the other direction from the output end surface 5 within the predetermined plane, and the first angle α and the second angle β are set so that light made incident from the output end surface 5 into a core 8 of the optical fiber 6 enters into a cladding 9.

主权项

1. A relief pattern detection device for detecting a relief pattern on an object surface, comprising:
a fiber optic plate having a first surface which is formed of first end faces of a plurality of optical fibers and with which the object surface is brought into contact and a second surface which is formed of second end faces of the optical fibers and is substantially parallel to the first surface; irradiation light source disposed on the second surface side of the fiber optic plate, for irradiating the second surface with light; and relief pattern detector disposed on the second surface side of the fiber optic plate, for detecting the relief pattern based on light emitted from the second surface, wherein the fiber optic plate includes the optical fibers and an absorber for absorbing light, disposed between the optical fibers, optical axes of the optical fibers are inclined so as to create a first angle less than 90° in one direction from a second surface within a predetermined plane substantially perpendicular to the second surface, the irradiation light source irradiates the second surface with light in a direction to create a second angle less than 90° in the other direction from the second surface within the predetermined plane, and the first angle and the second angle are set so that light made incident from the second surface into a core of the optical fiber enters into a cladding of the optical fiber, and the first angle is an angle within a range of 63° to 73° and the second angle is an angle within 5° to 30°.