发明名称 Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes
摘要 A system for measuring the absorption spectrum of a sample is provided that includes a broadband light source that produces broadband light defined within a range of an absorptance spectrum. An interferometer modulates the intensity of the broadband light source for a range of modulation frequencies. A bi-layer cantilever probe arm is thermally connected to a sample arm having at most two layers of materials. The broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm. A detector mechanism measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.
申请公布号 US9012849(B2) 申请公布日期 2015.04.21
申请号 US201313937713 申请日期 2013.07.09
申请人 Massachusetts Institute of Technology 发明人 Hsu Wei-Chun;Tong Jonathan Kien-Kwok;Liao Bolin;Burg Brian;Chen Gang
分类号 G01J5/02;G01J3/45;G01T1/36;G01N21/17;G01N21/3563 主分类号 G01J5/02
代理机构 Gesmer Updegrove LLP 代理人 Gesmer Updegrove LLP
主权项 1. A system for measuring the absorption spectrum of a sample comprising: a broadband light source that produces broadband light defined within a range of an absorptance spectrum; an interferometer that modulates the intensity of the broadband light source for a range of modulation frequencies; a bi-layer cantilever probe arm that is thermally connected to a sample arm having a plurality layers of materials, the broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm; and a detector mechanism that measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.
地址 Cambridge MA US