发明名称 Vertical cavity surface emitting laser nanoscope for near-field applications
摘要 A vertical cavity surface emitting laser (VCSEL) nanoscope is provided. The VCSEL nanoscope combines a VCSEL with a nano-scale aperture using a support member to separate the aperture from the VCSEL emission face. The resulting device is a useful near-field probe with a wide variety of applications.
申请公布号 US9014231(B2) 申请公布日期 2015.04.21
申请号 US201313758820 申请日期 2013.02.04
申请人 The Board of Trustees of the Leland Stanford Junior University 发明人 Vo Sonny;Harris, Jr. James S.
分类号 H01S3/08;H01S5/183;B82Y20/00;B82Y35/00;G01Q60/22;H01S5/026 主分类号 H01S3/08
代理机构 Lumen Patent Firm 代理人 Lumen Patent Firm
主权项 1. A near-field optical device comprising: a vertical cavity surface emitting laser (VCSEL) having an emission wavelength; a support member having a base and a tip, wherein the support member is substantially transparent at the emission wavelength; wherein the base of the support member is disposed on the VCSEL such that radiation emitted from the VCSEL propagates toward the tip of the support member; a screen disposed on the tip of the support member, wherein the screen is substantially opaque at the emission wavelength, except at an aperture that is present in the screen, wherein the aperture has a largest lateral dimension of half the emission wavelength or less; wherein the tip comprises a dielectric layer and wherein the screen comprises a metal layer, and further comprising a silicon intermediate layer sandwiched between the dielectric layer and the metal layer.
地址 Palo Alto CA US