主权项 |
1. A method of placing a component on a substrate in a desired position, the method comprising the steps of:
providing a global measuring system, providing a local measuring system located remote from the global measuring system, providing a frame, providing a component pick-and-place device moveable in X and Y directions with respect to the frame, wherein X and Y are linear directions and the X direction is perpendicular to the Y direction, the component pick-and-place device comprising a nozzle, providing a component feeding device, providing a substrate carrier, the substrate carrier being located closer to the local measuring system than to the global measuring system, providing a substrate on the substrate carrier, moving the component pick-and-place device to the component feeding device and picking up a component using the nozzle, moving the component pick-and-place device from the component feeding device to the substrate carrier, using the global measuring system to determine the position of the component pick-and-place device during movement of the component pick-and-place device from the component feeding device to the substrate carrier, and using the local measuring system located remote from the global measuring system and closer to the substrate carrier than the global measuring system to substantially continually determine, in the proximity of the desired position of the component on the substrate, the position of the component pick-and-place device with respect to the substrate during moving the component pick-and-place device in the proximity of the desired position of the component on the substrate. |